Fractal structures for MEMS variable capacitors

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United States of America Patent

PATENT NO 9614024
APP PUB NO 20140240894A1
SERIAL NO

14239346

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Abstract

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In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

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Patent Owner(s)

  • KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elshurafa, Amro M Thuwal, SA 3 12
Emira, Ahmed A Mission Viejo, US 7 52
Radwan, Ahmed Gomaa Ahmed Thuwal, SA 5 16
Salama, Khaled Nabil Thuwal, SA 20 73

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