Wafer storage box and method for preventing attachment of dust caused by static electricity on a wafer storage box
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United States of America Patent
Stats
-
Oct 12, 1999
Grant Date -
N/A
app pub date -
Apr 16, 1998
filing date -
Apr 16, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A carrier 2 that holds a wafer 3 is shut off from the outside environment by causing a box 1 and a box plate 4 to come into intimate physical contact by means of a box plate joiner 7. When this is done, a switch 9 of a electricity charger/discharger 5 is set to a first position so as to charge electricity to the box 1 via power supply circuit 10, causing dust within the box 1 to be attached to the inner walls 1a of the box 1 by electrostatic attraction. Thereafter, even if the box plate 4 that was joined to the box 1 is removed from the electricity charger/discharger 5, because the electricity of the box 1 remains, the electrostatic attraction effect persists. Thus, once dust is attracted, it remains attached to the inner walls 1a of the box 1.
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