Apparatus and method for batch non-contact material characterization

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United States of America Patent

PATENT NO 8198605
APP PUB NO 20110300645A1
SERIAL NO

13208891

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Abstract

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An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.

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Patent Owner(s)

  • VEECO INSTRUMENTS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Armour, Eric A Pennington, US 39 1818
Belousov, Mikhail Plainsboro, US 19 159
Lee, Dong Seung Bridgewater, US 4 30
Quinn, William E Whitehouse Station, US 119 1753

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