Processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11862505
APP PUB NO 20220270911A1
SERIAL NO

17651114

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A processing apparatus includes a wafer carrying-out unit, a wafer table that supports a wafer carried out, a frame carrying-out unit, a frame table that supports an annular frame carried out, a tape sticking unit that sticks a tape to the frame, a tape-attached frame conveying unit, a tape pressure bonding unit that executes pressure bonding of the tape of a tape-attached frame to a back surface of the wafer, a frame unit carrying-out unit, and a beveled part removing unit that cuts and removes, in a ring manner, a beveled part formed in an outer circumferential surplus region from the wafer of a frame unit.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATIONTOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kakinuma, Yoshinori Tokyo, JP 42 11
Mori, Takashi Tokyo, JP 302 3002
Saito, Yoshinobu Tokyo, JP 55 86

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