Ion balance adjusting method and method of removing charges from workpiece by using the same
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United States of America Patent
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Sep 8, 2009
Grant Date -
Jun 14, 2007
app pub date -
Nov 21, 2006
filing date -
Nov 25, 2005
priority date (Note) -
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Abstract
When charges are removed from a charged workpiece by applying positive and negative pulse-like high voltages to positive and negative electrode needles to generate positive and negative ions in a charge removing area and feeding the charged workpiece into the charge removing area, an ion balance inside the charge removing area is measured by a surface potential sensor before the workpiece is fed into the charge removing area, and a pulse width and/or a voltage value of the pulse-like high voltage applied to the electrode needle is changed depending on a measured result, thereby adjusting an amount of ions generated from the electrode needle to take a balance between the positive and negative ions.
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