Airtight package comprising a pressure adjustment unit
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United States of America Patent
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May 3, 2011
Grant Date -
Sep 4, 2008
app pub date -
Jan 23, 2008
filing date -
Jan 25, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An airtight sealed package with a device sealed therein in an airtight manner under vacuum, the device being placed in a space defined in the airtight sealed package by a lid and a substrate, includes at least one pressure adjustment unit provided on at least one of the lid and the substrate, and configured to receive energy from an outside of the airtight sealed package, with the device sealed in the airtight manner in the airtight sealed package, to adjust pressure in the space. An energy transmission member transmits the energy to the pressure adjustment unit.
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