Laterally excited bulk wave device with acoustic mirrors

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United States of America Patent

PATENT NO 11552614
APP PUB NO 20210167752A1
SERIAL NO

17105351

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Abstract

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A laterally excited bulk acoustic wave device is disclosed. The laterally excited bulk acoustic wave device can include a first solid acoustic mirror, a second solid acoustic mirror, a piezoelectric layer that is positioned between the first solid acoustic mirror and the second solid acoustic mirror, an interdigital transducer electrode on the piezoelectric layer, and a support substrate arranged to dissipate heat associated with the bulk acoustic wave. The interdigital transducer electrode is arranged to laterally excite a bulk acoustic wave. The first solid acoustic mirror and the second solid acoustic mirror are arranged to confine acoustic energy of the bulk acoustic wave. The first solid acoustic mirror is positioned on the support substrate.

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Patent Owner(s)

  • SKYWORKS SOLUTIONS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Caron, Joshua James Madison, US 39 298
Goto, Rei Osaka, JP 183 480

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