Airflow-organization testing method for a clean room and system using the same method
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United States of America Patent
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Jun 16, 2015
Grant Date -
Mar 6, 2014
app pub date -
Sep 21, 2012
filing date -
Sep 26, 2011
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Abstract
An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.
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