Shower head and film-forming device using the same

United States of America Patent

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Apr 26, 2011
Grant Date
Nov 29, 2007
app pub date
Oct 22, 2004
filing date
Oct 23, 2003

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TOKYO ELECTRON LIMITED

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C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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Inventor Name	Address	# of filed Patents	Total Citations
Amikura, Manabu	Nirasaki, JP	11	781
Iwata, Teruo	Nirasaki, JP	29	1735

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Shower head and film-forming device using the same

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United States of America Patent

10574531

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PATENT NO	7931749
APP PUB NO	20070272154A1
SERIAL NO	10574531
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 26, 2011	US,7931749,B2 US7931749B2	GRANTED PATENT AS SECOND PUBLICATION
November 29, 2007	US,20070272154,A1 US20070272154A1	FIRST PUBLISHED PATENT APPLICATION

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10574531

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