Superhydrophobic electrode and biosensing device using the same

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United States of America Patent

PATENT NO 11187672
APP PUB NO 20200141899A1
SERIAL NO

16733860

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Abstract

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A method for making a hydrophobic biosensing device includes forming alternating layers over a top and sides of a fin on a dielectric layer to form a stack of layers. The stack of layers are planarized to expose the top of the fin. The fin and every other layer are removed to form a cathode group of fins and an anode group of fins. A hydrophobic surface on the two groups of fins.

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Patent Owner(s)

  • IBM CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Afzali-Ardakani, Ali Ossining, US 281 3226
Balakrishnan, Karthik Scarsdale, US 334 2019
Bedell, Stephen W Wappingers Falls, US 409 5517
Hashemi, Pouya Purchase, US 599 4445
Hekmatshoartabari, Bahman White Plains, US 389 1807
Reznicek, Alexander Troy, US 1406 11120

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