Processing an object using a material processing device

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United States of America Patent

PATENT NO 11862428
APP PUB NO 20230097540A1
SERIAL NO

17730317

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Processing an object using a material processing device with a particle beam apparatus includes determining a region of interest of the object on or in a first material region of the object, ablating material from a second material region adjoining the first material region using an ablation device, and recognizing a geometric shape of the first material region. The geometric shape has a center. Processing the object also includes ablating material from a second portion of the first material region adjoining a first portion using a particle beam, the first portion having a first subregion and a second subregion, the region of interest being arranged in the first subregion, recognizing a further geometric shape of the first material region, positioning the object such that the first position corresponds to a center of the further geometric shape, and ablating material from the second subregion using the particle beam.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBHCARL-ZEISS-PROMENADE 10 JENA 07745

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Perez, Willard Fabian Aalen, DE 1 0

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