Gas injector with baffle

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11529592
APP PUB NO 20210322934A1
SERIAL NO

17365791

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
George, Rene San Carlos, US 40 459
Hawrylchak, Lara Gilroy, US 76 471
Moffatt, Stephen St. Brelade, JE 116 1162
Olsen, Christopher S Fremont, US 91 3490
Pandey, Vishwas Kumar Madhya Pradesh, IN 45 85
Pradhan, Kailash Campbell, US 8 17
Shah, Kartik Saratoga, US 78 990
Shono, Eric Kihara San Mateo, US 33 94
Swenberg, Johanes F Los Gatos, US 17 1565
Tallavarjula, Sairaju Santa Clara, US 11 79

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