Imprint apparatus, imprint method, and article manufacturing method
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United States of America Patent
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Sep 20, 2022
Grant Date -
Jun 21, 2018
app pub date -
Jul 14, 2016
filing date -
Jul 16, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
An imprint apparatus cures an imprint material supplied onto a substrate held by a substrate holder by bringing a mold held by a mold holder into contact with the imprint material. The imprint apparatus includes an adjuster to adjust a distance between the substrate holder and the mold holder for contact and separation between the imprint material and the mold, an energy supply tool to supply, to the imprint material, energy for curing the imprint material supplied onto the substrate held by the substrate holder, and a controller to control the adjuster and the energy supply tool. The controller controls the adjuster so as to start separation between the imprint material and the mold in a period during which the energy supply tool supplies the energy to the imprint material that is in contact with the mold.
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