Importance

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Abstract

A surface geometry measuring apparatus which relies upon triangulation to measure the distance to an object from a sensor head comprising projection optics and observation optics, wherein the projection optics has a drive mechanism capable of adjusting the laser beam projecting position or the baseline length, the distance to the object is calculated by measuring the baseline length at the time when the point at which a spot of the laser light projected to the object forms a focused image on the observation plane in the observation optics has come to the center of the observation plane, the surface geometry measuring apparatus has a mechanism for causing the sensor head or observation optics to move or turn from side to side and a mechanism for causing the sensor head to turn up and down such that the moving or turning from side to side and the turning up and down allow the point of measurement on the object to be scanned with the laser beam two-dimensionally to measure the surface geometry of the object. The apparatus withstands use in extreme environments such as high temperature and high radiation and it can also be used as a range finder.

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First Claim