Information processing apparatus and information processing method

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United States of America Patent

PATENT NO 11715194
SERIAL NO

17191063

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Abstract

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An information processing apparatus has an acquisitor configured to acquire an entire area image obtained by capturing an entire area of a processing surface of a wafer including at least one defect, a training image selector configured to select, as a training image, a partial image including at least one defect from the entire area image, a model constructor configured to construct a calculation model of generating a label image obtained by extracting and binarizing the defect included in the partial image, and a learner configured to update a parameter of the calculation model based on a difference between the label image generated by inputting the training image to the calculation model and a reference label image obtained by extracting and binarizing the defect of the training image.

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Patent Owner(s)

  • KIOXIA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujiwara, Takeshi Yokohama, JP 112 677
Ng, Youyang Yokohama, JP 9 12
Ohashi, Takuji Yokohama, JP 4 3
Wang, Bo Yokohama, JP 646 3666
Yamane, Osamu Ebina, JP 16 32

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