Tilted interferometer
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United States of America Patent
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Oct 19, 2004
Grant Date -
Feb 27, 2003
app pub date -
Aug 14, 2002
filing date -
Aug 23, 2001
priority date (Note) -
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Abstract
The invention comprises methods and apparatus for reducing sub-harmonic cyclic errors by rotating by a small angle an interferometer or elements thereof. The rotation of the interferometer or selective elements thereof introduces a corresponding small angle between a sub-harmonic type spurious beam that subsequently interferes with either the reference or measurement beam so that the fringe contrast of the interference terms between the subharmonic spurious beam and either the reference or measurement beam is reduced by a required factor for a given use application thereby reducing nonlinearities in the phase signal.
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