Capacitive finger coupling element on a silicon support for coupling a strip line structure

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United States of America Patent

PATENT NO 6876268
APP PUB NO 20040036549A1
SERIAL NO

10381236

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Abstract

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A coupling element for an HF strip line structure on an HF substrate, implemented in thin-layer technology as a finger coupler structure on a silicon support is described. The bonding to the strip line tracks of the HF strip line structure is effected via metallizations, in particular in the form of spacers.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Keith, Stefan Leonberg, DE 3 12
Reimann, Mathias Stuttgart, DE 12 24
Steinbuch, Dirk Wimsheim, DE 37 315
Ulm, Markus Sersheim, DE 24 306
Walter, Thomas Renningen, DE 106 818

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