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Abstract

A radiographic inspection method of irradiating a circuit forming device with X-rays to inspect the inside of the device. The method includes an X-ray irradiation step of irradiating the circuit forming device with X-rays, an X-ray detection step of detecting X-rays having penetrated the circuit forming device which is rotated every predetermined degrees of angle about an axis intersecting the irradiation direction of X-rays at right angles, a tomogram creating step of creating a plurality of tomograms based on data on penetrated X-rays detected in the X-ray detection step, a projected image creating step of creating projected images in three axial directions intersecting at right angles based on the plurality of tomograms created in the tomogram creating step, and a defect detecting step of detecting a defect such as a crack of the circuit forming device based on the projected images created in the projected image creating step.

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First Claim