Substrate storage container

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11735449
APP PUB NO 20200286761A1
SERIAL NO

16763990

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.

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First Claim

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Patent Owner(s)

  • SHIN-ETSU POLYMER CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mimura, Hiroshi Saitama, JP 22 288
Onuki, Kazumasa Niigata, JP 3 8
Suda, Takashi Niigata, JP 25 218
Toda, Junya Saitama, JP 11 94

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