Film bulk acoustic resonator

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United States of America Patent

PATENT NO 11641184
APP PUB NO 20200412318A1
SERIAL NO

17016887

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Abstract

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Film bulk acoustic resonator (FBAR) is provided. An exemplary FBAR includes a substrate; a first insulating material layer on the substrate, the first insulating material layer containing a first cavity; a second insulating material layer on the first insulating material layer, the second insulating material layer containing a second cavity and a third cavity spaced apart from the second cavity, the second cavity and the third cavity both in communication with the first cavity; a resonator sheet covering the second cavity and partially extending over the second insulating material layer; a third insulating material layer over the second insulating material layer and the resonator sheet, the third insulating material layer containing a fourth cavity, the fourth cavity in communication with the third cavity, and the fourth cavity partially overlapping the second cavity; and a capping layer on the third insulating material layer.

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Patent Owner(s)

  • NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Xiaochuan Shanghai, CN 91 455

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