Semiconductor device with fish bone structure and methods of forming the same

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United States of America Patent

PATENT NO 11791422
APP PUB NO 20220262958A1
SERIAL NO

17739802

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Abstract

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Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Kuo-Hsiu Taoyuan County, TW 39 67
Yang, Chih-Chuan Hsinchu, TW 85 82

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