Helical optical pulse stretcher
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United States of America Patent
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Oct 27, 2009
Grant Date -
Mar 20, 2008
app pub date -
Nov 21, 2007
filing date -
May 24, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A lithographic system and method using an illumination system, a single pass pulse stretcher, an optical system, a patterning device and a projection system. The optical system is arranged around the single pass pulse stretcher. A beam enters the single pass stretcher and is reflected in a helical path using the optical system for multiple passes through the single pass pulse stretcher. The single pass pulse stretcher can include two 90° prisms, with a beam splitter located therebetween. The optical system can include first and second prisms. At least one of the first and second prisms can be a roof prism. The first and second prisms can have at least one surface oriented so as to direct the beam into the helical path. The optical system can have at least one mirror, or a plurality of mirrors.
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Cited Art Landscape
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