Gas distribution assembly for improved pump-purge and precursor delivery
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United States of America Patent
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Feb 21, 2023
Grant Date -
N/A
app pub date -
Oct 27, 2021
filing date -
Jun 18, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.
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