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Abstract

Measured values obtained in a measuring machine to be estimated are provided to estimate errors in the measured values. Based on the estimated errors in the measured values, a covariance matrix or correlation matrix of measured values is derived. The covariance matrix or correlation matrix is then subjected to eigenvalue decomposition to derive eigenvalues and eigenvectors. A normal random number with an expected value of 0 and a variance equal to an eigenvalue corresponding to the eigenvalue is generated as a coefficient of coupling for each eigenvector, and all eigenvectors are linearly coupled to generate pseudo-measured values of the measuring machine. The generated pseudo-measured values are subjected to statistic processing to estimate uncertainty of the measuring machine.

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