Angular speed sensor and method for fabricating the same
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United States of America Patent
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Aug 28, 2007
Grant Date -
Dec 7, 2006
app pub date -
Jun 23, 2005
filing date -
Jul 8, 2004
priority date (Note) -
In Force
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Abstract
Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the conductive layers, and a method for manufacturing the angular velocity sensor. The drive electrode unit, the monitor electrode unit and the sensing electrode unit are each provided with bottom electrode (29) formed on substrate (33) having the shape of a tuning fork, piezoelectric film (30) made of piezoelectric material and formed on bottom electrode (29), and top electrode (31) formed on piezoelectric film (30). Ends (31T) of top electrode (31) are located inside ends (30T) of piezoelectric film (30) so as to expose ends (30T) of piezoelectric film (30) beyond top electrode (31), thereby forming exposed parts (32). When exposed parts (32) have a thickness of 't', piezoelectric film (30) is made to have an exposed width (L) of not less than 0.3 t.
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