Coating material based on a copper-indium-gallium alloy, in particular for the production of sputter targets, tubular cathodes and the like
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United States of America Patent
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May 18, 2010
Grant Date -
May 29, 2008
app pub date -
Nov 20, 2007
filing date -
Nov 23, 2006
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Abstract
The copper-indium-gallium (CuInGa) alloy is in particular to be used for the production of sputter targets, tubular cathodes and similar coating material sources. It has a phase corresponding to a Cu5Zn8 prototype phase in which the lattice sites of the zinc atoms (Zn) are occupied by gallium atoms (gallium-substituted Cu5Zn8 phase) and in which indium is simultaneously introduced into the elementary cell or phase, making up a proportion of up to 26 wt %.
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