Probe card, and testing apparatus having the same
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United States of America Patent
Stats
-
Dec 23, 2003
Grant Date -
Aug 28, 2003
app pub date -
Feb 25, 2002
filing date -
Nov 26, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Multiple probe needles are arranged to be brought into contact with one electrode pad with a probe card, the multiple probe needles are connected in parallel with the same potential, and configured so that the amount of current flowing through the probe needles is at least halved, thereby decreasing generation of heat from Joule heat, and preventing melting of aluminum of which the electrode pads are composed. Consequently, a probe card can be provided wherein adhesion of molten material to the probe needles is suppressed, and wherein increased contact resistance due to oxidization of the material which has melted and adhered is prevented.
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