Method, control device and vacuum arrangement

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11804385
APP PUB NO 20210183664A1
SERIAL NO

17118645

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Abstract

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According to various aspects of the disclosure, a method may comprise: varying a drive force, by which a chamber valve of a vacuum chamber is held closed, when the vacuum chamber has been evacuated; and aerating the vacuum chamber after the variation of the drive force; transporting a substrate through the chamber valve when the chamber valve has been opened.

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Patent Owner(s)

  • VON ARDENNE ASSET GMBH & CO. KG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haeusler, Christoph Freital, DE 2 4
Kretzschmar, Christin Dresden, DE 1 1
Loehnert, Mirko Dresden, DE 1 1

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