Semiconductor device and including an optical waveguide and method of manufacturing the same

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United States of America

PATENT NO 11262500
APP PUB NO 20210165160A1
SERIAL NO

16700580

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Abstract

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A semiconductor device includes a semiconductor substrate having a first surface, a second surface opposite to the first surface, and having a first recess portion formed on the first surface, a first cladding layer located in the first recess portion, and a first optical waveguide formed on the first cladding layer. The first optical waveguide overlaps with the first cladding layer in plan view.

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Patent Owner(s)

  • RENESAS ELECTRONICS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iida, Tetsuya Tokyo, JP 151 1321
Nakashiba, Yasutaka Tokyo, JP 331 1900
Nakayama, Tomoo Tokyo, JP 16 57
Namioka, Seigo Tokyo, JP 5 13

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