Norbornene-type polymers, compositions thereof and lithographic process using such compositions
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United States of America Patent
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Sep 21, 2010
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Feb 22, 2006
filing date -
Feb 22, 2005
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Abstract
Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.
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