Converter and method of manufacturing the same
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United States of America Patent
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Sep 13, 2005
Grant Date -
Feb 26, 2004
app pub date -
Aug 19, 2003
filing date -
Aug 20, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A pressure sensor 10 included an upper substrate 30 having a detection face 30A, a diaphragm 20 provided with a space from the detection substrate 30 and displaceable to and from the upper substrate 30, fixed electrodes 32, 33 provided on the detection face 30A of the upper substrate 30, and a first signal fetching section 22 electrically connected to the diaphragm 20, and the diaphragm 20 is formed by dry-etching single-crystal silicon with the specific resistance lowered to 1.0 Ω·cm or below by mixing dopant lowering the resistance value.
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