Catadioptric projection optical system and exposure apparatus having the same
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United States of America Patent
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Aug 7, 2007
Grant Date -
Apr 20, 2006
app pub date -
Oct 20, 2005
filing date -
Oct 20, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.
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