Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope
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United States of America Patent
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Aug 17, 2010
Grant Date -
Mar 26, 2009
app pub date -
Sep 25, 2007
filing date -
Sep 25, 2007
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Abstract
A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.
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