Wafer carrier with ultraphobic surfaces
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United States of America Patent
Stats
-
Dec 20, 2005
Grant Date -
Oct 21, 2004
app pub date -
Jun 3, 2003
filing date -
Apr 15, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. In the invention, entire surfaces or portions of surfaces of a carrier are made ultraphobic. The ultraphobic surfaces of the carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily 'roll off' without leaving a liquid film or substantial number of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.
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