Reaction compensation device and fast steering mirror system
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United States of America Patent
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Feb 21, 2023
Grant Date -
May 13, 2021
app pub date -
Dec 26, 2017
filing date -
Jan 11, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
A reaction compensation device includes a drive mechanism driving a first movable part with respect to a base, a reaction mass drive mechanism driving a second movable part with respect to the base; and a first relative position sensor measuring a relative position between the first movable part and the base. There is also a second relative position sensor measuring a relative position between the second movable part and the base, a first control system controlling the drive mechanism by taking in a signal outputted from the first relative position sensor as a feedback signal in response to a command value, and a second control system correcting the command value using a correction parameter for adjusting a difference between mass properties of the drive mechanism and reaction mass drive mechanism and for controlling the reaction mass drive mechanism.
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