Electroacoustic resonator and method for manufacturing the same

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United States of America Patent

PATENT NO 11711066
APP PUB NO 20200127640A1
SERIAL NO

16655304

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Abstract

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The invention relates to a method for manufacturing an electroacoustic resonator comprising the steps of: Providing a first substrate having a first side and an opposite second side; depositing a diamond layer having a first side and an opposite second side on said first substrate, wherein the second side of the diamond layer is in contact with said first side of the first substrate; removing the first substrate; forming a piezoelectric layer on the second side of the diamond layer; applying a second substrate to the first side of the diamond layer.

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Patent Owner(s)

  • FRAUNHOFER -GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lebedev, Vadim Emmendingen, DE 2 3

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