Multi-wavelength optical thermometry
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United States of America Patent
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Nov 23, 1993
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N/A
app pub date -
Sep 25, 1992
filing date -
Sep 25, 1992
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Expired
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Abstract
Multi-wavelength optical thermometry provides for non-contact measurement of the temperature of a sample where the front surface and the back surface of the sample are used in a interferometer to measure changes in optical path length. Laser beams at two different wavelengths are used and the beam phase of the two resultant interference signals is used to unambiguously measure the path length change over a broad temperature range.
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