Temperature control system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 21, 2002
Grant Date -
May 31, 2001
app pub date -
Nov 29, 2000
filing date -
Nov 30, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An object of the present invention is to provide a temperature control system in a simple constitution as well as be capable of strictly controlling the temperature on the side of the process device of the fluid supplied via the pathway from the chiller device. The present invention comprises the fluid supplying pathway 4 and the return pathway 5 connecting the process device 1 to the chiller device 2, the first temperature control section 3 controlling the temperature of the outlet 1a of the chiller device 1 and the second temperature control section 6 provided in the supplying pathway 4, wherein the second temperature control section 6 supplies the fluid to the above-described process device 2 after finely controlling the temperature of the fluid supplied from the above-described chiller device 1 as well as detects the temperature T1 on the side of the process device and requires the outlet temperature T2 of the chiller device for the first temperature control section corresponding to the detected temperature.
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