Importance

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Abstract

A laser cutting system, including a steering mirror assembly for directing a laser beam through a predetermined cutting path along a workpiece or substrate material. The steering mirror assembly includes a base, and a mirror pivotally supported on the base by a flexure assembly which confines pivotal movement of the mirror about a vertical Y-axis and/or about a horizontal X-axis. A pair of electrical actuator assemblies include movable bobbin assemblies connected to the mirror by control rod flexures at locations on the mirror which are spaced 90.degree. apart from one another. In operation, selective electrical energization of the actuator assemblies controls movement of the bobbin assemblies to pivot the mirror about the vertical Y-axis and/or about the horizontal X-axis throughout a number of angular orientations to thereby direct the laser beam through a predetermined cutting operation pattern along the substrate surface to cut materials from the substrate. The flexure arrangements which support the mirror on the base and which connect the bobbin assemblies to the mirror facilitate substantially frictionless movement of the bobbin assemblies and the mirror, which allows the mirror to pivot at high operational speeds during the cutting sequence.

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First Claim