Metal high dielectric constant transistor with reverse-T gate

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United States of America Patent

PATENT NO 7736981
APP PUB NO 20090273042A1
SERIAL NO

12113527

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Abstract

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A transistor is provided. The transistor includes a silicon layer including a source region and a drain region. A gate stack is disposed on the silicon layer between the source region and the drain region. The gate stack comprises a first layer of a high dielectric constant material, a second layer comprising a metal or metal alloy, and a third layer comprising silicon or polysilicon. A lateral extent of the second layer of the gate stack is substantially greater than a lateral extent of the third layer of the gate stack. Also provided are methods for fabricating such a transistor.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Leland New York, US 157 4512
Lauer, Isaac White Plains, US 218 1821
Sleight, Jeffrey W Ridgefield, US 297 5073

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