Substrate holding device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 21, 2007
Grant Date -
Jun 9, 2005
app pub date -
Oct 7, 2004
filing date -
Oct 8, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate holding device includes: holding members configured to hold substrates, the holding members being arranged along a predetermined arranging direction and being movable along the arranging direction; an interlocking mechanism interlocking the holding members for simultaneous coordinate movement along the arranging direction to change intervals between the holding members with respect to the arranging direction; driving unit for driving the holding members for shifting at least along the arranging direction; and control unit for controlling the driving unit to shift the holding members to substrate taking positions where the holding members are able to hold substrates, respectively, in accordance with a mapping information about a condition of arrangement of the substrates arranged along the arranging direction.
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