Cyclical epitaxial deposition system and gas distribution module thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11214872
APP PUB NO 20200385869A1
SERIAL NO

16886940

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Abstract

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A cyclical epitaxial deposition system and a gas distribution module are provided. The gas distribution module includes an inflow element having a plurality of inlet holes, a guide assembly, and an outflow element. The guide assembly disposed between the inflow and outflow elements includes a plurality of guide channels separate from one another and a plurality of temporary gas retention trenches respectively corresponding to the guide channels. Each of the guide channels is in fluid communication with the corresponding inlet hole. The outflow element has a plurality of diffusion regions respectively corresponding to the gas retention trenches, and a plurality of outlet channels respectively corresponding to the diffusion regions. Each of the diffusion regions has a plurality of diffusion apertures, and each of the temporary gas retention trenches is in fluid communication with the corresponding outlet channel through the diffusion apertures in the corresponding diffusion region.

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Patent Owner(s)

  • GOLD CARBON CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chao, Chia-Hung Taoyuan, TW 2 1
Hsieh, Chien-Te Taoyuan, TW 16 51
Lin, Yeou-Fu Taoyuan, TW 5 13

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