Gas leak sensing device, setting method for gas leak sensing, gas leak sensing method, and tangible medium

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United States of America Patent

PATENT NO 11719596
SERIAL NO

17365391

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A gas leak sensing device includes a constant flow rate control valve, a pressurization control valve, a supply-side gas circuit, a master-side gas circuit, a workpiece-side gas circuit, an equal pressure valve, an exhaust valve, a test pressure sensor, and a differential pressure sensor. The supply-side gas circuit is connected with the constant flow rate control valve and the pressurization control valve. The equal pressure valve performs opening and closing between the supply-side gas circuit and the master-side gas circuit and opening and closing between the supply-side gas circuit and the workpiece-side gas circuit. The exhaust valve performs opening and closing between the workpiece-side gas circuit and outside. The test pressure sensor detects pressure in the supply-side gas circuit. The differential pressure sensor detects a differential pressure between the master-side gas circuit and the workpiece-side gas circuit.

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Patent Owner(s)

  • COSMO INSTRUMENTS CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuse, Akio Tokyo, JP 13 201
Sasaki, Satoru Tokyo, JP 60 478

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