Focused ion beam deposition
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Feb 6, 2007
Grant Date -
Dec 26, 2002
app pub date -
Jul 30, 2002
filing date -
Dec 29, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Introducing at least one metal such as cobalt, molybdenum, metal carbonyl, tungsten, platinum, or other suitable metal to a focused ion beam. Introducing the focused ion beam to a substrate within a processing chamber. Forming at least one layer over a substrate. Applying heat to the layer by, for example, a laser.
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