EFEM, equipment front end module

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United States of America

PATENT NO 10593580
SERIAL NO

15934819

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Abstract

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The present invention relates to an equipment front end module (EFEM) configured to perform wafer transfer between process equipment and a wafer storage device that stores wafers. More particularly, the present invention relates to an equipment front end module (EFEM), which enables gases supplied into the wafer transfer chamber to efficiently flow to maintain cleanness in the wafer transfer chamber at a high level, thus preventing contamination in the wafer transfer chamber.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Woo, Bum Je Seongnam, KR 30 74

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