Fluid control device, fluid supply system, and fluid supply method

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United States of America Patent

PATENT NO 11873916
APP PUB NO 20230244251A1
SERIAL NO

18003259

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

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Patent Owner(s)

  • FUJIKIN INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishino, Kouji Osaka, JP 168 2312
Shinohara, Tsutomu Osaka, JP 142 876
Takimoto, Masahiko Osaka, JP 17 22
Yoshida, Toshihide Osaka, JP 31 271

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