Replacement apparatus for an optical element

United States of America Patent

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Aug 3, 2010
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Jul 2, 2009
app pub date
Mar 10, 2009
filing date
Dec 23, 2003

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Abstract

A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.

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Patent Owner(s)

CARL ZEISS SMT GMBH

International Classification(s)

G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Ittner, Thomas	Aalen, DE	15	128
Kugler, Jens	Heubach, DE	81	476
Schletterer, Thomas	Koenigsbronn, DE	19	135
Sorg, Franz	Aalen, DE	40	300
Wurmbrand, Andreas	Aalen-Reichenbach, DE	25	190

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Replacement apparatus for an optical element

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12400965

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PATENT NO	7768723
APP PUB NO	20090168207A1
SERIAL NO	12400965
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 03, 2010	US,7768723,B2 US7768723B2	GRANTED PATENT AS SECOND PUBLICATION
July 02, 2009	US,20090168207,A1 US20090168207A1	FIRST PUBLISHED PATENT APPLICATION

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12400965

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