Thin film structure and semiconductor device including the same

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United States of America Patent

PATENT NO 11804536
APP PUB NO 20210359101A1
SERIAL NO

17244175

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Abstract

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A thin film structure including ferroelectrics and anti-ferroelectrics and a semiconductor device including the same are provided. The thin film structure includes a first anti-ferroelectric layer comprising anti-ferroelectrics, a second anti-ferroelectric layer disposed apart from the first anti-ferroelectric layer and including anti-ferroelectrics, and a ferroelectric layer between the first anti-ferroelectric layer and the second anti-ferroelectric layer and including ferroelectrics.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heo, Jinseong Seoul, KR 110 275
Jo, Sanghyun Seoul, KR 66 89
Moon, Taehwan Suwon-si, KR 30 18
Nam, Seunggeol Suwon-si, KR 62 93

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