Determining critical parameters using a high-dimensional variable selection model
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United States of America Patent
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Jul 23, 2019
Grant Date -
Jun 9, 2016
app pub date -
Dec 1, 2015
filing date -
Dec 3, 2014
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Abstract
A high-dimensional variable selection unit determines a list of critical parameters from sensor data and parametric tool measurements from a semiconductor manufacturing tool, such as a semiconductor inspection tool or other types of semiconductor manufacturing tools. The high-dimensional variable selection model can be, for example, elastic net, forward-stagewise regression, or least angle regression. The list of critical parameters may be used to design a next generation semiconductor manufacturing tool, to bring the semiconductor manufacturing tool back to a normal status, to match a semiconductor manufacturing tool's results with that of another semiconductor manufacturing tool, or to develop a specification for the semiconductor manufacturing tool.
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