Membrane and mask, and exposure apparatus using the mask, and device producing method using the mask
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United States of America Patent
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Mar 16, 1999
Grant Date -
N/A
app pub date -
Jul 16, 1996
filing date -
Jul 18, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
X-ray or vacuum-ultraviolet-ray transmissive mask membrane is constituted by a laminated film. The laminated film is obtained by continuously forming a SiCN film on one of or each of sides of a SiC film. Thereby, a membrane, which is superior in physical or mechanical strength and in surface conditions and optical transmittance, is provided. Moreover, there is provided a mask using the membrane.
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